| 摘要 |
PURPOSE:To eliminate blocking of an output hole with resin, etc., to facilitate manufacture and to improve reliability by wiring the hole from the intermediate to the outside of a gap by film forming technique having high reliability. CONSTITUTION:The position of a movable electrode 3 is restricted at a position where a silicon plate 1 is etched by an electrostatic force applied to the electrode 3 formed at the end of a cantilever 2 and stationary electrodes 4, 5 of upper and lower glass places 6, 7, and an output signal corresponding to its acceleration is output. Gaps 18, 15 for not bringing wires from the electrodes 4, 5 into contact are provided at both side surfaces of the plate 1. In this case, the electrode 5 is connected to a lead electrode 8 via connecting leads 11', 11'' of output holes 9, 9' and an outer connection wire 17, and the electrode 4 is connected to an upper lead pad via a connection lead 11 of an output hole 10. Thus, gaps 15, 18 are short and opened ports can be eliminated. The leads 11, 11', 11'', etc., are high-frequency ion plated. |
