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经营范围
发明名称
DIGITAL ETCHING METHOD
摘要
申请公布号
JPH03276719(A)
申请公布日期
1991.12.06
申请号
JP19900075556
申请日期
1990.03.27
申请人
HORIIKE YASUHIRO;ULVAC JAPAN LTD
发明人
HORIIKE YASUHIRO;HAYASHI TOSHIO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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地址
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