发明名称 ANGULAR VELOCITY SENSOR
摘要 PURPOSE:To eliminate an unnecessary signal component and to improve the detection accuracy by adjusting the area of a piezoelectric element for driving and the electrode for a signal lead-out wire. CONSTITUTION:When AC electric power is supplied to the piezoelectric element 3 for driving, the piezoelectric element 3 for driving is put in tuning fork vibration. A piezoelectric element 1 for detection when rotating at an angular velocity omegagenerate a voltage with a Coriolis force. When the orthogonal error between the piezoelectric element 3 for driving and piezoelectric element 1 for detection is large, an unnecessary signal is generated to generate an error. Electrode lead-out parts 12a and 12b are provided to parts of electrodes 8a and 8b for signal lead-out wires and removed partially to form trimming parts 13. The area of the trimming parts 13 is adjusted to balance the generation of charges and the unnecessary signal component due to the orthogonal error, etc., is compensated.
申请公布号 JPH03276013(A) 申请公布日期 1991.12.06
申请号 JP19900077854 申请日期 1990.03.27
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 UEDA KAZUMITSU;TAKENAKA HIROSHI;HORII SEIICHI;NOZU MIKIO;SENDA HIROSHI;TERADA JIRO
分类号 G01C19/56;G01P9/04 主分类号 G01C19/56
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