| 摘要 |
PURPOSE:To prevent developer from splashing outside a cup by providing a member to reduce kinetic energy of developer jetted from a nozzle to a position spaced by a specified interval away from an inner side of the cup which encloses a chuck. CONSTITUTION:Developer 6 which does not hit a chuck 1 and a substrate 2 but moves directly toward an inner side 8 of the cup 4 collides with an energy reducing member 10. The developer 6 which hit a wire material 11 splits up into a plurality of particles 6a and passes through the energy reducing member 10 while reducing kinetic energy without rebounding due to elasticity of the wire material 11. In the process, a part of developer 6b having hit the material 11 attaches to the wire material 11 due to the viscosity. Meanwhile, the developer 6 which does not hit the line material 11 and passes through the energy reducing member 10 comes into contact with the developer 6b which has already attached to the wire material 11 while passing through an its kinetic energy is reduced by mutual viscosity of developers 6, 6b. Therefore, the developer 6 which has passed through the energy reducing member 10 does not splash outside and does not have an adverse effect to a peripheral as it can not hold its kinetic energy to splash outside the cup 4. |
