SPATIAL FILTER DETECTOR AND INSTRUMENT FOR MEASURING DISPLACEMENT QUANTITY OF PATTERN TRAVERSING PHOTOSENSITIVE ELEMENT,申请号JP19900076092-传众专利搜索

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发明名称	SPATIAL FILTER DETECTOR AND INSTRUMENT FOR MEASURING DISPLACEMENT QUANTITY OF PATTERN TRAVERSING PHOTOSENSITIVE ELEMENT
摘要
申请公布号	JPH03274401(A)	申请公布日期	1991.12.05
申请号	JP19900076092	申请日期	1990.03.26
申请人	RIKAGAKU KENKYUSHO;ONO SOKKI CO LTD	发明人	OKAMOTO TAKAYUKI;YAMAGUCHI ICHIRO;NAGAYAMA HIDENORI
分类号	G01B11/00	主分类号	G01B11/00
代理机构		代理人
主权项
地址

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