| 摘要 |
<p>PURPOSE:To achieve miniaturization and cost reduction and to detect a position with high accuracy by fixing a small-sized position sensor to a movable part and analogously outputting the moving distance of the sensor by the circuit provided in the sensor. CONSTITUTION:The semiconductor acceleration sensor 14 incorporated in the first position sensor 1 is driven by a constant current driving means 13 and the signal accompanying the displacement of a piston rod 3, that is, the displacement of the sensor 1 is amplified by an amplifying circuit 15 and outputted as an acceleration signal 10. This output is inputted to the first integration circuit 16 to output a speed signal 9 and, further, a position signal 8 is outputted as analogue voltage from the second integration circuit 17. The contact output of the second position sensor 2 is outputted when the rod 3 passes through a reference position (origin) and used in combination with the output of the sensor 1 to make it possible to output the position signal 8 as a reference position signal, that is, a contact opening and closing signal and, therefore, a position can be detected with high accuracy.</p> |
