METHOD FOR CONTROLLING OXIDATION OF SEMICONDUCTOR,申请号JP19900073319-传众专利搜索

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发明名称	METHOD FOR CONTROLLING OXIDATION OF SEMICONDUCTOR
摘要
申请公布号	JPH03274729(A)	申请公布日期	1991.12.05
申请号	JP19900073319	申请日期	1990.03.26
申请人	HITACHI LTD	发明人	KANBARA SHIRO;UENISHI HIROBUMI
分类号	H01L21/316	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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