| 摘要 |
PURPOSE:To measure a fine surface structure by taking an approximate measurement by using a probe whose tip curvature radius is too large to measure the fine shape of a surface directly and correcting the measured value by using a calibration diagram which is formed in advance. CONSTITUTION:The probe 1 is made of metal having a radius R of curvature atop and while a fine voltage is applied between the probe and a sample 2 which is an electric conductor, the both are put close to each other, so a current I flows through their narrow gap delta before they contact each other directly. This current I varies large even with slight variation of the fine gap. Then when the work function phi of the surface of the sample 2 is constant, the probe 1 is moved horizontally by piezoelectric elements PX3 and PY4 and a voltage applied to a piezoelectric element PZ5 is controlled to make the current I constant, so that when the function phi of the surface of the sample 2 is constant, the value of the voltage applied to each piezoelectric element indicates a value regarding the surface ruggedness of the sample. |
