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发明名称
GATE-ELECTRODE FORMING METHOD
摘要
申请公布号
JPH03273622(A)
申请公布日期
1991.12.04
申请号
JP19900075040
申请日期
1990.03.22
申请人
NEC CORP
发明人
TOKUNAGA KAZUNAO
分类号
H01L29/78;H01L21/28;H01L21/338;H01L29/812
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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