METHOD OF PLASMA ETCHING METALS THAT FORM USUALLY LOW VOLATILITY CHLORIDES,申请号EP19880114476-传众专利搜索

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发明名称	METHOD OF PLASMA ETCHING METALS THAT FORM USUALLY LOW VOLATILITY CHLORIDES
摘要
申请公布号	EP0309773(B1)	申请公布日期	1991.12.04
申请号	EP19880114476	申请日期	1988.09.05
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	BAUSMITH, ROBERT CROWELL;COTE, WILLIAM JOSEPH;CRONIN, JOHN EDWARD;HOLLAND, KAREY LYNN;KAANTA, CARTER WELLING;LEE, PEI-ING PAUL;WRIGHT, TERRANCE MONTE
分类号	C23F4/00;H01L21/3213	主分类号	C23F4/00
代理机构		代理人
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