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发明名称
SEALING DEVICE
摘要
申请公布号
JPH03272365(A)
申请公布日期
1991.12.04
申请号
JP19900071562
申请日期
1990.03.20
申请人
TOKYO ELECTRON LTD;TOKYO ELECTRON SAGAMI LTD
发明人
IWATA TERUO;HATTORI HISASHI;SEKIZUKA HIROSHI
分类号
F16J13/02;B01J3/03;F16J12/00;F27B17/00;F27D1/00;F27D7/06;H01L21/205;H01L21/22
主分类号
F16J13/02
代理机构
代理人
主权项
地址
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