| 摘要 |
The present invention provides an apparatus for loading an unprocessed semiconductor wafer doped in advance with impurity diffusion layers on the both sides or not doped, re-slicing the wafer and unloading two sheets of re-sliced wafer as processed wafers upon completion of re-slicing the unprocessed wafer into two sheets to a recovery wafer magazine thus as a total system for operating the aforementioned processes for improving the productivity of cutting processes of the semiconductor wafer production, more particularly provides an improved loading and unloading mechanism arranged between a storage space of both unprocessed and processed wafers and a reslicing mechanism, chucking mechanisms and wafer magazines in the storage space. The loading and unloading mechanism comprises a loading manipulator and an unloading manipulator, wherein the loading manipulator receives an unprocessed wafer from the storage space and then conveys and loads the wafer on chucking mechanism which is operated in combination with a re-slicing mechanism, and then the unloading manipulator recovers two sheets of re-sliced wafers from the chucking mechanism and further unload them into another wafer magazine. During the unloading manipulator is unloading the two sheets of re-sliced wafers into the magazine, simultaneously the loading manipulator will take out a new unprocessed wafer, wherein the new wafer is conveyed at a stand-by position and await until the completion of re-slicing an earlier wafer on the chucking mechanism. |
