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发明名称
SUBSTRATE HOLDER
摘要
申请公布号
JPH03271193(A)
申请公布日期
1991.12.03
申请号
JP19900071468
申请日期
1990.03.19
申请人
FUJITSU LTD
发明人
NAKAMURA TOSHIHIRO
分类号
C30B23/08;C30B25/12;H01L21/203
主分类号
C30B23/08
代理机构
代理人
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地址
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