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经营范围
发明名称
SURFACE TREATMENT DEVICE
摘要
申请公布号
JPH03272139(A)
申请公布日期
1991.12.03
申请号
JP19900069780
申请日期
1990.03.22
申请人
HITACHI LTD
发明人
TOKUDA MITSUO;KAWASUMI KENICHI;FUJITO TOSHIAKI;HASHIZAKI MOTOHIRO;INADA AKIISA;YAMAGUCHI SUMIO
分类号
H01L21/302;H01L21/027;H01L21/30;H01L21/304;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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