摘要 |
PURPOSE:To enable production of the titled homogeneous thin film having a desired thickness, by applying a precursor solution of LiNbO3 obtained by partially hydrolyzing a complex alkoxide of Li with Nb onto a substrate and firing the resultant film. CONSTITUTION:Ethoxylithium and pentaethoxyniobium are mixed, dissolved in ethanol so as to provide 1:1 molar ratio of Li:Nb and refluxed to prepare a complex alkoxide. Decarbonated water diluted with ethanol is then dripped thereinto. The complex alkoxide is hydrolyzed and ethanol is evaporated to afford a concentrated solution of a precursor of lithium niobate LiNbO3. Steps for applying the precursor solution onto a sapphire single crystal substrate and firing the formed film while heating at >=400 deg.C are repeated once or more to form oriented lithium niobate having the composition formula of LiNbO3 in one layer or laminated into a multilayer film on the above-mentioned substrate. |