发明名称 |
PROCESS FOR PREPARING HIGH-TEMPERATURE SUPERCONDUCTING THIN FILMS |
摘要 |
Improvement in a process for preparing a-axis oriented thin film of high-Tc oxide superconducting material by laser evaporation method. Before the a-axis oriented thin film of oxide superconducting material is deposited by laser evaporation method, an under-layer having an a-axis orientation of the crystal of the same oxide superconducting material is deposited on a substrate previously by sputtering.
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申请公布号 |
CA2043541(A1) |
申请公布日期 |
1991.12.01 |
申请号 |
CA19912043541 |
申请日期 |
1991.05.30 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
TANAKA, SABURO;NAKANISHI, HIDENORI;ITOZAKI, HIDEO |
分类号 |
H01L39/24;(IPC1-7):H01L39/24 |
主分类号 |
H01L39/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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