发明名称 PROCESS FOR PREPARING HIGH-TEMPERATURE SUPERCONDUCTING THIN FILMS
摘要 Improvement in a process for preparing a-axis oriented thin film of high-Tc oxide superconducting material by laser evaporation method. Before the a-axis oriented thin film of oxide superconducting material is deposited by laser evaporation method, an under-layer having an a-axis orientation of the crystal of the same oxide superconducting material is deposited on a substrate previously by sputtering.
申请公布号 CA2043541(A1) 申请公布日期 1991.12.01
申请号 CA19912043541 申请日期 1991.05.30
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 TANAKA, SABURO;NAKANISHI, HIDENORI;ITOZAKI, HIDEO
分类号 H01L39/24;(IPC1-7):H01L39/24 主分类号 H01L39/24
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