METHOD AND SYSTEM FOR INSPECTION OF ELECTROCONDUCTIVE FILM USING EDDY CURRENT AND PROCESS AND SYSTEM FOR PRODUCTION OF OPTICAL FIBRES USING METHOD AND SYSTEM

摘要

54 METHOD AND APPARATUS FOR INSPECTION OF ELECTROCONDUCTIVE FILM USING EDDY CURRENT AND PROCESS AND APPARATUS FOR PRODUCTION OF OPTICAL FIBERS USING METHOD AND APPARATUS A method and system for accurately inspecting an electroconductive film using an eddy current and a process and apparatus for production of an optical fiber which measures on-line the electrical resistance, which shows the state of formation of the electroconductive hermetic coating of the optical fiber by the electroconductive film inspection method and reflects back the measurement results to the hermetic coating forming conditions are disclosed. Optical fiber is made up of a core, cladding, amorphous carbon film or other electroconductive hermetic coating formed on the outer surface of the cladding, and a protective coating. The electrical resistance of the hermetic coating generates an eddy current at the coating, the eddy current generated is detected, and the phase angle of the complex impedance is detected to enable calculation. In particular, to accurately detect the phase angle, the high frequency current for generating the eddy current is changes by a low frequency of about 1/100th of the high frequency to change the average intensity and obtain at least two points of measurement defining the above phase angle. The electrical resistance of the hermetic coating is calculated from this phase angle. The electrical resistance shows the state of formation of the hermetic coating. The measurement value of the electrical resistance of the hermetic coating is used for setting the hermetic coating production conditions. The electroconductive film inspection method of the present invention may also be used for quality control etc. of thin films.