| 摘要 |
PURPOSE:To improve the performance of inspection by providing a light-path changing device and a device for moving the device up and down, changing the light path of lighting light at an approximately horizontal position, and thereby inputting the sufficient image of an object to be inspected. CONSTITUTION:A lighting device projects lighting light on the side of wire from a light projecting body. A ring lighting device 2 is arranged at a position which is separated from the center of the optical axis of a camera 1 to the side of the camera 1. The wire is provided in the optical axis 11 of the lighting light. The light path is changed to the side of the wire with a light-path changing device 3 which is arranged at the outer surface of the side part and projected on an object to be inspected 6. At this time, a vertical moving device 7 for the light-path changing means moves the changing device 3 up and down. The light path 11 of the emitted light is changed to a position which is approximately horizontal with the object 6. Then, the three-dimensional structure of the object 6 is concentratedly irradiated in the approximately horizontal direction, and the object 6 can be lightened in the field of view. Thus the stable photographed image of the object 6 is obtained. |
