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发明名称
INSPECTING DEVICE FOR INTEGRATED CIRCUIT COMPONENT
摘要
申请公布号
JPH03269270(A)
申请公布日期
1991.11.29
申请号
JP19900067256
申请日期
1990.03.19
申请人
JAPAN SYNTHETIC RUBBER CO LTD
发明人
KIMURA KIYOSHI;OGURO HISASHI
分类号
G01R31/00;G01R31/26
主分类号
G01R31/00
代理机构
代理人
主权项
地址
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