| 摘要 |
PURPOSE:To enable local cooling by a weak current, by concentrating the cooling parts of a Peltier cooling means to the central part of a humidity detection element from which a substrate is removed. CONSTITUTION:A plurality of first metal patterns 24 and second metal patterns 25 are alternately arranged and the terminal parts of the first metal patterns 24 are successively connected to that of the second metal patterns 25 and these connected parts are arranged to the central part 26 and peripheral part 27 of a substrate 20 every other one to form a Peltier cooling means. In the vicinity to the connection part of the substrate 20, the temp.-sensitive part 30 of a cooling temp detection means is arranged through an insulating part and a water droplet detection means 33 is further formed thereto through an insulating layer. The central part 21 of the substrate 20 is removed by etching. |
