Transport system for semiconductor wafer discs - uses feed channels supplied with filtered air transporting discs between clean rooms

摘要

The transport system uses a closed system of feed channels (6,7), extending between the different clean rooms (1,2), through which filtered air is fed. The wafer discs (11) are supported by carriers (10) fed through the feed channels (6,7) by transport devices (12,15) contained within the latter. Pref. the feed channels (6,7) comprise horizontal pipes (6) and vertical ducts (7) at spaced points along the latter. ADVANTAGE - Ensures semiconductor wafer discs are not soiled during transport.