发明名称 |
DIAMOND-LIKE CARBON MATERIAL PRODUCED BY LASER PLASMA DEPOSITION |
摘要 |
A method and apparatus are disclosed for producing amorphic or ultra fine-grained, diamond-like material on a substrate. Uniform, high quality dehydrogenated diamond-like material is produced when a hardened target material is used and/or when a laser beam strikes the target at non-perpendicular angles of incidence. Also, selective placement of particles upon a substrate as well as simultaneous cleaning of the substrate is achieved by a secondary electrode placed within the laser beam path of travel between a first electrode and the substrate. |
申请公布号 |
AU7882391(A) |
申请公布日期 |
1991.11.27 |
申请号 |
AU19910078823 |
申请日期 |
1991.05.08 |
申请人 |
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM |
发明人 |
CARL B. COLLINS;FARZIN DAVANLOO |
分类号 |
C23C14/06;C23C14/28;C30B23/02 |
主分类号 |
C23C14/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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