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发明名称
PLASMA PROCESSOR
摘要
申请公布号
JPH03266427(A)
申请公布日期
1991.11.27
申请号
JP19900064199
申请日期
1990.03.16
申请人
HITACHI LTD
发明人
YAMAMOTO HIDEYUKI;OMOTO HIROHIDE;SHINTANI TETSUO
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
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地址
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