TENTATIVE CURING DEVICE FOR COLOR FILTER

摘要

PURPOSE:To eliminate the temp. difference at the time of tentative curing and to prevent the generation of unequal patterns at the time of development by providing a hot plate which vacuum chucks a substrate coated with colored resins and tentatively cures the colored resins by fixing and heating the same and a means for preventing the warpage of the substrate by pressing the peripheral part of the substrate at the time of the heating. CONSTITUTION:The substrate coated with the colored resins in vacuum chucked to the hot plate 1 with a vacuum chuck in uniform tight contact therewith and is heated by using the hot plate 1 in order to tentatively curing the colored resins applied on the substrate 2 by heating the resins. The peripheral part of the substrate 2 is mechanically pressed right after the substrate 2 is mounted on the hot plate 1 by using substrate retaining plates 3, 4. The warpage of the substrate is prevented in this way and the temps. distribution in the substrate at the time of the heating is uniformized, by which the generation of the unequal patterns at the time of development is prevented.