| 摘要 |
PURPOSE:To roughen the mirror-polished surface of an AlN-based insulating substrate for forming a thin film and to enhance the adhesive strength of a formed thin film by etching the substrate with a specified soln. CONSTITUTION:An etching soln. is prepd. by mixing 1wt.% EDTA, 7-8wt.% NH4OH and 12-14wt.% H2O2 with 40-45wt.% H2O. AlN powder is mixed with a prescribed amt. of a sintering aid and a binder, this mixture is molded and fired and the surface of the resulting AlN-based substrate for forming a thin film is mirror-polished. This polished surface is etched with the etching soln. |
