CAPACITIVE DISPLACEMENT MEASURING DEVICE WITH T-SHAPED SCALE COATINGS

摘要

A capacitance length and/or angle measuring device has a transducer comprising a stationary part (1) forming a scale and a part (2) displaceable parallel over the surface of the scale, at a short distance therefrom and acting as a sensing unit. The opposite surfaces of the scale and sensing unit are provided with capacitor coatings (5,6,7,8,9). The mechanical quantity to be measured causes an area vibration of a capacitor, the capacitance variation resulting therefrom acting as a variable capacitive reactance in a circuit, which changes the phase position of the electrical signals. With an appropriate configuration of the capacitor surfaces one obtains a linear function between the mechanical quantity to be measured and the phase portion of the signals.