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发明名称
SURFACE PROCESSING OF GAAS SUBSTRATE
摘要
申请公布号
JPH03265135(A)
申请公布日期
1991.11.26
申请号
JP19900064950
申请日期
1990.03.15
申请人
SUMITOMO ELECTRIC IND LTD
发明人
ISHII MANABU
分类号
H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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