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发明名称
SEMICONDUCTOR DEVICE HAVING A PLANARIZED SURFACE
摘要
申请公布号
US5068711(A)
申请公布日期
1991.11.26
申请号
US19900495514
申请日期
1990.03.19
申请人
FUJITSU LIMITED
发明人
MISE, TATSUYA
分类号
H01L21/3105;H01L21/768;H01L23/522
主分类号
H01L21/3105
代理机构
代理人
主权项
地址
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