| 摘要 |
PURPOSE:To measure a minute gap quickly and highly accurately, by detecting the position of a deark part or bright part of interference fringes formed in a photoelectric transducer part 8, and obtaining the gaps between two bodies from said position. CONSTITUTION:A dark part of interference fringes is generated in gaps h1 and h2 between a disk 5 and a slider 6 and picked up by a photoelectric transducer part. A signal corresponding to brightness is obtained by scanning said interference fringes. X and Y directions are determined, and a voltage in the Y direction is fixed to VR. Then the entire width in the X direction is scanned, and a signal 7 is obtained. V1 and V2 are obtained from scanning voltages V0, Vh1, and Vh2 corresponding to the dark part of the brightness signal. Thus the minimum value of the gap can be determined. |
