| 摘要 |
PURPOSE:To obtain a magnetic recording medium which is excellent in a magnetic characteristic, without decreasing a precipitation speed, by making gaseous Xe or Kr existing in the system which keeps the precipitation speed/gaseous pressure of Co (alloy) within a specific range, when Co (alloy) is vapor-deposited on the base body. CONSTITUTION:A base body 5 of a polyester film, etc. is set onto a water cooled substrate 2 in a bell jar 1, and Co (alloy) 6 in a hearth 3 is heated by an electronic beam heating device consisting of the hearth 3 and a thermion source 4, and is vapor-deposited on the base body 5 so as to reduce the vapor-deposition angle alpha against the substrate 2 to 70 deg.. In this case, the inside is exhausted by a rotary pump 7 and a diffusion pump 8, gaseous Xe or Kr is led from a lead-in pipe 9, gaseous pressure is made 2X10<-3> in case when the precipitation speed of Co (alloy) is made, for instance, 0.12mu/min, and the precipitation speed/gas pressure of the precipitation speed/min/torr is held within the range of 5-1,000mu. In this way, a magnetic recording medium which is excellent in coercive force and an angular shape ratio. |
