Swivelable mass spectrometer to measure properties of particle stream - provides in-situ measurement of mass-, energy-and angular-distribution e.g. for integrated circuit

摘要

Measurement of physical properties of a particle stream of large cross-section emanating from esp. a dry etching unit used for prodn. of integrated circuits, comprises deflecting a thin beam from the stream into the measuring unit contg. a swivelable mass spectrometer for determining the mass-, energy- and angular-distribution of the particles in the stream. The particle stream is measured at selected intervals from the particle source. The unit comprises an evacuatable process chamber (5) with a source adaptor as a vacuum-tight coupling between chamber and particle source. A diaphragm unit with a small shutter separates the measuring unit from the particle source. ADVANTAGE - A single measuring unit determines the various properties.