| 摘要 |
The interferometer (7) contains a semiconducting laser (1), at least one beam divider, two or more reflectors forming a measurement interferometers with one to the measurement object and at least one interference signal detector. The detector output signal feeds an evaluation device for measuring distance variations of the object. An associated adjacent reference interferometer (9) has a rigid reflector arrangement (21, 24) and a reference signal detector (22) connected to a control circuit for the laser frequency. The control circuit maintains a constant reference signal detector output signal by varying the laser's operating parameters or supply voltage.
|
