MANUFACTURE OF HIGH-TEMPERATURE SUPERCONDUCTING THIN FILM

摘要

PURPOSE:To obtain a thin film having excellent crystallinity and electrical characteristics orientated in a-axis in forming a film by vacuum deposition method by forming a film on an oxide superconductor orientated in a axis previously made. CONSTITUTION:At first, a thin film of oxide superconductor orientated in axis is grown. The oxide superconductor is preferably a thin film prepared by sputtering method. Then the thin film is used as a substrate and a thin film of oxide superconductor orientated in a-axis is grown on the substrate. A substrate temperature in the preparation is a temperature at which a thin film of oxide superconductor orientated in c-axis is formed. Since the substrate is the thin film of oxide superconductor orientated in a-axis even by forming the film at the substrate temperature, the prepared high-temperature superconducting thin film is orientated in a-axis and a high-quality thin film having excellent crystallinity and sufficient intake of oxygen is obtained.