| 发明名称 |
Radiation-sensitive resin composition. |
| 摘要 |
<p>A radiation-sensitive resin composition comprises a solution of an alkali-soluble resin and a radiation-sensitive compound in a solvent comprising a monooxymonocarboxylic acid ester. This composition has a high storage stability (i.e., a very small amount of fine particles are formed during storage) and is suited for use as a resist for making integrated circuits.</p> |
| 申请公布号 |
EP0457367(A1) |
申请公布日期 |
1991.11.21 |
| 申请号 |
EP19910111608 |
申请日期 |
1986.08.07 |
| 申请人 |
JAPAN SYNTHETIC RUBBER CO., LTD. |
发明人 |
HOSAKA, YOSHIHIRO;NOZUE, IKUO;TAKATORI, MASASHIGE;HARITA, YOSHIYUKI |
| 分类号 |
G03C1/00;C08K5/28;C08L61/06;G03C1/72;G03F7/004;G03F7/008;G03F7/022;H01L21/027 |
主分类号 |
G03C1/00 |
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代理人 |
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