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发明名称
VERFAHREN UND VORRICHTUNG ZUR PLASMABEHANDLUNG VON HALBLEITERANORDNUNGEN
摘要
申请公布号
DE4115706(A1)
申请公布日期
1991.11.21
申请号
DE19914115706
申请日期
1991.05.14
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP
发明人
NAKAGUMA, SHINJI;BANJO, TOSHINOBU, FUKUOKA, JP
分类号
C23F4/00;C23C16/509;H01J37/32;H01L21/205;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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