Methods of reducing anti-fuse resistance during programming.

摘要

An already- programmed anti-fuse is DC soaked by passing DC current through the anti-fuse from a DC voltage source applied across the electrodes of the anti-fuse. the anti-fuse resistance is loer when the DC voltage being applied such that the positive end of the voltage source is applied to the electrode having the higher arsenic concentration. An already programmed anti-fuse is AC soaked, by passing alternating current pulses through the anti-fuse from an AC voltage source applied across the anti-fuse electrodes. This AC soak may even be applied following the controlled polarity DC soak disclosed herein. The AC soaked anti-fuse resistance is even lower than DC soaked anti-fuse under the same soak current level.