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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03262115(A)
申请公布日期
1991.11.21
申请号
JP19900061400
申请日期
1990.03.12
申请人
NEC CORP
发明人
KOIDE KATSUO
分类号
H01L21/3213;H01L21/027;H01L21/3205
主分类号
H01L21/3213
代理机构
代理人
主权项
地址
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