| 摘要 |
PURPOSE:To measure for clearance rapidly with high precision by arranging plural sensors for picture-element detection opposite to interference stripes generated in corresponding to clearance between two bodies, and by detecting light parts and dark parts of the interference stripes. CONSTITUTION:Light from light source 1 is passed through a filter 2 to obtain monochromatic light, which is projected upon a slider 6 through a half-mirror 4 and a glass disk 5. Reflected light from the surface of the slider 6 and that from the surface of the glass disk 5 from interference stripes, which are imaged on a line camera 5 through a lens 8. The position of a slider surface 6 on the camera 7 from a slide-level setting circuit 13 is determined. Outputs in one clock from a clock generator 10 are compared mutually through a sample holding circuit 14, an AD converter 15, a latch circut 16, and a comparator 17 and a comparator 18 is opened according to an increase in the difference to input a sensor number and a level to a data processing circuit 19, thereby measuring fine clearance rapidly with high precision by the positions of the light and dark parts of the interference strips. |
