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发明名称
SPUTTERING METHOD
摘要
申请公布号
JPH03260068(A)
申请公布日期
1991.11.20
申请号
JP19900056346
申请日期
1990.03.09
申请人
HITACHI LTD
发明人
OKAMOTO AKIRA;YAJIMA AKIRA;YONEOKA YUJI
分类号
C23C14/34;C23C14/54
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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