| 发明名称 |
SPUTTERING DEVICE |
| 摘要 |
|
| 申请公布号 |
JPH03260067(A) |
申请公布日期 |
1991.11.20 |
| 申请号 |
JP19900060424 |
申请日期 |
1990.03.12 |
| 申请人 |
FUJI ELECTRIC CO LTD |
发明人 |
KONDO KENJI |
| 分类号 |
C23C14/35;H01L21/203 |
主分类号 |
C23C14/35 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
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