PRODUCTION OF TARGET FOR SPUTTERING,申请号JP19900059702-传众专利搜索

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发明名称	PRODUCTION OF TARGET FOR SPUTTERING
摘要
申请公布号	JPH03260066(A)	申请公布日期	1991.11.20
申请号	JP19900059702	申请日期	1990.03.09
申请人	MITSUBISHI KASEI CORP	发明人	KUNITOMO HARUO;IKEDA MASAYUKI;SUGIMURA NOBUO
分类号	B22F3/24;C23C14/34	主分类号	B22F3/24
代理机构		代理人
主权项
地址

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