发明名称 |
Diamond film thermistor |
摘要 |
A diamond thin film thermistor having a substrate, an electrically insulating diamond layer formed on the substrate by vapor-phase synthesis, a semiconducting diamond layer as a temperature-sensing part on the electrically insulating diamond layer by vapor-phase synthesis, and metal thin film electrodes attached to the semiconducting diamond layer. A plurality of such diamond thin film thermistors can simultaneously be formed on a single substrate, and the substrate is cut with a dicing saw to provide individual diamond thin film thermistor chips of the same quality.
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申请公布号 |
US5066938(A) |
申请公布日期 |
1991.11.19 |
申请号 |
US19900596068 |
申请日期 |
1990.10.11 |
申请人 |
KABUSHIKI KAISHA KOBE SEIKO SHO |
发明人 |
KOBASHI, KOJI;MIYATA, KOICHI;KUMAGAI, KAZUO;INOUE, TAKAYOSHI;TACHIBANA, HIROYUKI;NAKAUE, AKIMITSU |
分类号 |
G01K7/22;H01C7/04;H01L21/822;H01L27/04 |
主分类号 |
G01K7/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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