Topography simulation method

摘要

A topography simulation method enables estimation of the three-dimensional shape of a surface of a workpiece where material removal by a predetermined process takes place. This simulation method includes the steps of dividing a region of the workpiece to be removed into a plurality of partial regions; setting a diffusion coefficient for each partial region with a diffusion component contributing to material removal, and calculating a contour surface of the concentration of the diffusion component by a process which employs modified diffusion equations. The contour surface obtained the surface after material removal.