发明名称 |
METHOD AND APPARATUS FOR DELIVERING OIL TO A MULTI-STAGE PUMP |
摘要 |
A method and apparatus for delivering oil into a pump chamber of a high-vacuum stage of a multi-stage pump. The method includes the steps of sensing a first pressure at an intake region of the high-vacuum stage of the pump, and sensing a second pressure at a discharge region of the high-vacuum stage of the pump. Oil is delivered to the high-vacuum stage of the pump in response to a pressure difference between the first and second pressures. Increased quantities of oil are delivered to the high-vacuum stage of the pump when the pressure difference exceeds a predetermined value. A gas ballast may also be delivered to the high-vacuum stage of the pump when the pressure difference exceeds this predetermined value. The apparatus may include a diaphragm valve including a diaphragm mounted between subchambers that are respectively in fluid communication with the intake and discharge regions of the high-vacuum stage of the pump. When the pressure differential between the intake and discharge regions, and thus the subchambers, reaches a predetermined level, the diaphragm is distended to a sufficient degree to unseat a valve element, which allows increased quantities of oil to be delivered to the high-vacuum stage of the pump.
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申请公布号 |
US5066202(A) |
申请公布日期 |
1991.11.19 |
申请号 |
US19900533535 |
申请日期 |
1990.06.05 |
申请人 |
LEYBOLD AKTIENGESELLSCHAFT |
发明人 |
BERGES, HANNS-PETER;FISCHER, BERTHOLD;MUELLER, PETER;VORBERG, DIETER |
分类号 |
F04C29/00 |
主分类号 |
F04C29/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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