MATERIALS FOR CHEMICAL VAPOR DEPOSITION PROCESSES

摘要

In chemical vapor deposition processes, reactor and/or material handling par ts and/or furniture comprise carbon fiber reinforced carbon matrix material. Silicon may serve as a precoat to the deposition of a further refractory or other protective coat- ing. A method of coating a carbonaceous body is provided, including depositi ng a coating of silicon and depositing on the sili- con-coated body a coating of a protective or refractory material chemically compatible with silicon.