| 摘要 |
PURPOSE:To purify the surface of a sample easily by providing an ultraviolet- ray source to irradiate ultraviolet rays over the sample, and removing absorbed molecules by exciting or excitation-dissolving them with the ultraviolet rays. CONSTITUTION:A sample 23 is provided on a sample stage 19 which is connected to an analysis chamber 20 through a valve 7, connected to a vacuum pump 6 through a valve 5, and supported by a conveying rod 3, and ultraviolet rays emitted from a heavy hydrogen lamp 4 or the like are made to irradiate the sample through a partition wall made of quartz. When the solid surface of the sample loaded in a vacuum is irradiated with ultraviolet rays, the molecules of water and hydrocarbon are excited and removed from the solid surface effectively, and when thin membranes of high polymer are adhered there, they are excited to dissolve by the ultraviolet rays, and removed from the solid surface. Consequently, a sample exchange chamber 21 in which the adsorbed substance on the sample surface can easily be removed can be obtained. |
