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发明名称
PLASMA TREATMENT DEVICE
摘要
申请公布号
JPH03257824(A)
申请公布日期
1991.11.18
申请号
JP19900055543
申请日期
1990.03.07
申请人
FUJITSU LTD
发明人
TAKAHASHI TSUTOMU
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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