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发明名称
SEMICONDUCTOR WAFER
摘要
申请公布号
JPH03256314(A)
申请公布日期
1991.11.15
申请号
JP19900055424
申请日期
1990.03.06
申请人
NEC CORP
发明人
KOBAYASHI AKIRO
分类号
H01L21/02;H01L29/06
主分类号
H01L21/02
代理机构
代理人
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地址
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