发明名称 |
IMPROVED COAXIAL CAVITY TYPE, RADIOFREQUENCY WAVE, PLASMA GENERATING APPARATUS |
摘要 |
<p>A coaxial radiofrequency wave plasma generating apparatus with an elongate metallic cavity (10) having a movable elongate coupling probe (16) mounted in line with an axis (a-a) of the cavity having a central coaxial conductor (11) and having a movable plate (12) for obtaining a mode of resonance of the radiofrequency wave in the cavity surrounding a chamber (14) for confining the plasma (100) is described. An end (11b) of the conductor is adjacent to the chamber and can optionally support a set of magnets (27). The apparatus is particularly useful for retrofitting existing vacuum sources (101) having small inlet ports (105) for plasma treatment using molecular beam epitaxy (MBE).</p> |
申请公布号 |
GR910300023(T1) |
申请公布日期 |
1991.11.15 |
申请号 |
GR19910300023T |
申请日期 |
1991.11.15 |
申请人 |
THE BOARD OF TRUSTEES OF THE MICHIGAN STATE UNIVERSITY |
发明人 |
ASMUSSEN, JES |
分类号 |
H01J27/18;C30B23/02;H01J27/16;H01J37/08;H01J37/317;H05H1/46;(IPC1-7):H05H1/46 |
主分类号 |
H01J27/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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