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发明名称
MAGNETRON TYPE SPUTTERING DEVICE
摘要
申请公布号
JPH03257163(A)
申请公布日期
1991.11.15
申请号
JP19900054116
申请日期
1990.03.05
申请人
NEC CORP
发明人
SHIRAISHI YASUSHI
分类号
C23C14/35;H01L21/285
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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